ISO INTERNATIONAL STANDARD 21360-6 First edition 2023-12 Vacuum technology Standard methods for measuring vacuum-pump performance - Part 6: Cryogenic vacuum pumps Technique du vide - Méthodes normalisées pour mesurer les performances des pompes a vide- Partie 6: Pompes a vide cryogéniques Reference number ISO 21360-6:2023(E) osi IS02023 IS0 21360-6:2023(E) COPYRIGHT PROTECTED DOCUMENT @IS02023 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on or ISo's member body in the country of the requester. ISO copyright office CP 401 · Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Email: [email protected] Website: www.iso.org Published in Switzerland i @ IS0 2023 - All rights reserved
ISO 21360-6 2023 Vacuum technology — Standard methods for measuring vacuu