ISO INTERNATIONAL STANDARD 15932 Firstedition 2013-12-15 Microbeam analysis Analytical electron microscopy - Vocabulary Analyseparmicrofaisceaux-Microscopieélectroniqueanalytique Vocabulaire Reference number IS015932:2013(E) LSO IS02013 edwithoutlicensefrom IHS Not for Resale IS015932:2013(E) COPYRIGHTPROTECTEDDOCUMENT ISO2013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56.CH-1211 Geneva 20 Tel. + 4122 749 01 11 Fax +41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2013- All rights reserved No reproduction or networking permited without license from IHS Not for Resale IS015932:2013(E) Contents Page Foreword ..iv Introduction. 0 Scope. 1 Abbreviatedterms ..1 2 DefinitionsoftermsusedinthephysicalbasisofAEM 3 Definitions of terms used in AEM instrumentation 4 Definitions ofterms used in specimenpreparation of AEM ..10 5 Definitions ofterms used inAEMimageformationand processing ..11 6 Definitionsoftermsused inAEMimageinterpretationandanalysis .13 7 Definitions of terms used in the measurement and calibration of AEM image magnification andresolution .17 8 DefinitionsoftermsusedinelectrondiffractioninAEM .18 Bibliography .21 iii license from IHS Not for Resale